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Compared
to conventional methods of reclaiming silicon wafers, KOBE's patented
process offers the following advantages:
1. Less silicon is removed to allow additional
reclaim cycles. This translates into greater value for the customer
and increased reclaim vs new test wafers.
2. Surface metal contamination is effectively
removed and controlled to very low levels.
3. The process is robust and can reclaim the
most difficult multi-layered patterned wafers and still maintain
minimal silicon removal.
4. Through a combination of innovative chemistry
and precision mechanical processing, there is a substantial reduction
of toxic and hazardous chemicals supporting the industry's desire
towards more environmental responsibility.
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